A Graph-Theoretic Approach for Spatial Filtering and Its Impact on Mixed-Type Spatial Pattern Recognition in Wafer Bin Maps

Statistical quality control in semiconductor manufacturing hinges on effective diagnostics of wafer bin maps, wherein a key challenge is to detect how defective chips tend to spatially cluster on a wafer—a problem known as spatial pattern recognition. Recently, there has been a growing interest in mixed-type spatial pattern recognition—when multiple defect patterns, of different shapes, co-exist o...